![]() ![]() and J.B.) Berkeley Fellowship for Graduate Studies and the National Science Foundation Graduate Fellowship Program (J.P.L.) Nanoelectronics Research Initiative South West Academy of Nanoelectronics Center and Chinese Academy of Sciences President’s International Fellowship Initiative (Q.W. (A.B.S.) Office of Naval Research (J.P.L. Department of Energy (DOE), Office of Science (overall analysis of experimental/theoretical data, MoS 2 materials processing/fabrication, and electron transport measurements) including support by the Molecular Foundry, an Office of Science national user facility Applied Materials Inc. This work demonstrated the shortest transistor ever and that Moore’s law can continue a while longer by proper engineering of the semiconductor material and device architecture. The characteristics of the nanometer-sized transistor have been measured and show a subthreshold swing ~65 mV/decade and On/Off current ratio ~10 6. In comparison to current materials, these newly discovered materials have lower dielectric constants, larger band gaps, and a larger carrier effective mass making them ideally matched to the device requirements. These novel materials are atomically uniform at a thickness down to a monolayer. The team used these materials to fabricate a fully operational transistor. However, researchers have demonstrated that using the semiconducting material molybdenum disulfide (MoS 2) and single-walled carbon nanotubes, the transistor gate length can be reduced to a record size of 1 nanometer. It is not possible to shrink it below 5 nanometers using silicon. The gate length of a transistor is the defining parameter of the transistor size, and is presently about 20 nanometers in commercial electronic chips. Since the introduction of integrated circuits, the observation referred to as Moore’s law has been met - about every year, the number of transistors per unit area has doubled continuously, which is a direct consequence of our ability to continue to decrease the size of a transistor. The next generation of microelectronics will only be realized by finding ways to continue to reduce the size of a transistor. The result of this research shows that it is feasible to continue to reduce the size of a transistor, all the way down to 1 nanometer. Below this feature size, it was not clear how to build next-generation devices. ![]() However, when the gate length of the transistors approaches 5 nanometers, it was believed that our ability to continue to shrink a transistor size would reach its limit. This has been realized by the ability to decrease the size of a transistor. Moore’s law states that the number of transistors per square inch on a microchip has doubled every year since they were invented. They did so using atomically flat, two-dimensional molybdenum disulfide semiconductor and a single-walled carbon nanotube imbedded in zirconium dioxide. However, scientists built fully functional, nanometer-sized transistors. Simply put, the physics and atomic structural imperfections couldn’t be overcome. It has long been thought that building nanometer-sized transistors was impossible. The width of the nanotube is less than 1/1000 th of the diameter of a red blood cell. ![]() The atomic structure of the layers in the transmission electron microscope image on the right shows the nanotube embedded in the ZrO 2 layer and resting on a silicon dioxide (SiO 2) layer. The current flowing through the atomically thin molybdenum disulfide (MoS 2) material, placed between the source (S) and drain (D) terminals, is controlled by the voltage applied to the 1-nanometer-thick single-walled carbon nanotube (SWCNT), imbedded in zirconium dioxide (ZrO 2) dielectric material. Image reprinted with permission from Science Schematic of the smallest field effect transistor ever made shows the components of the transistor. Smallest Transistor Ever Atomically flat materials used to fabricate the world’s smallest transistor. ![]()
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